Sensors and actuators

Higher education teachers: Možek Matej
Credits: 5
Subject code: 64811

Subject description


  • Enrolment in the 1st year of doctoral study programme

Content (Syllabus outline):

Sensor definitions, transduction principles, classifications of sensors and actuators.
Essential sensor properties: characteristics, sensitivity, accuracy, resolution, selectivity, minimal detected signal, threshold, nonlinearity, repeatability, noise, temperature zero drift, overload, stability, analysis of sensor dynamic response
Review of standard silicon microelectronic technologies: Micromachining: basic materials properties, deposition, etching, LIGA, sacrified film, laser application, opening sealing, substrate bonding, sensor chip encapsulation/packaging, 3D structures fabrication
Analog and digital signal conditioning in sensor and actuator systems.
Review of sensor and actuator structures and applications: Piezoresistive, Piezoelectric, Pyroelectric, Capacitive, Resonant, Thermoelectric, Radiation, Magnetic, Chemical, Optical fiberAdvanced sensor and actuator structures,

Objectives and competences:

Understanding of effects, structures, technologies and applications of sensors and actuators.
Application of obtained sensor and actuator knowledge for realization of advanced sensor and actuator systems.

Intended learning outcomes:

Presentation of effects, structures, technologies and applications of sensors and actuators, and their application in practical problems in advanced sensor and actuator systems.

Learning and teaching methods:

  • Lectures, seminar

Study materials

  1. Lyshevski, Sergey E. "Nano- and microelectromechanical systems",2005, CRC press, SBN 0-8493-916-6
  2. Fraden, Jacob "Handbook of modern sensors : physics, designs, and applications",2010, Springer, ISBN 1-4419-6465-7
  3. Horowitz, Paul, Hill, Winfield "The art of electronics",2008, Cambridge University Press, SBN 978-0-521-37095-0
  4. Soloman, Sabrie "Sensors handbook",2010 , McGraw-Hil ISBN 978-0-07-160570-0
  5. Amon, Slavko "Senzorji in aktuatorji",2013, Fakulteta za elektrotehniko, ISBN: 978-961-243-240-9